Focused Ion Beam Microscopy: Basics and Applications

The focused ion beam (FIB) microscope has gained widespread use in the materials sciences over the last several years and has become an indispensable tool for materials characterization and micromachining. This lecture will cover the basics and applications of focused ion beam microscopy relevant for the materials sciences: (a) ion sources, (b) ion optics, (c) ion-solid interaction, (d) ion milling, sputtering and deposition, (e) scanning ion microscopy, (f) simulation of the transport of ions in matter, and (g) applications including focused ion beam lithography and micromachining.