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11-01-9063 Focused Ion Beam Microscopy: Basics and Applications · TUPlan

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11-01-9063

Focused Ion Beam Microscopy: Basics and Applications

FB11 Material- und Geowissenschaften · Offered in WiSe 2025/26

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Weekly sessions · WiSe 2025/26

Wed12:35–14:05L201/127 · Vorlesung

Parts

11-01-9063-vlLecture2 contact h/week

Language: Englisch
Taught by: Dr. rer. nat. Leopoldo Molina-Luna

Course content

The focused ion beam (FIB) microscope has gained widespread use in the materials sciences over the last several years and has become an indispensable tool for materials characterization and micromachining. This lecture will cover the basics and applications of focused ion beam microscopy relevant for the materials sciences: (a) ion sources, (b) ion optics, (c) ion-solid interaction, (d) ion milling, sputtering and deposition, (e) scanning ion microscopy, (f) simulation of the transport of ions in matter, and (g) applications including focused ion beam lithography and micromachining.

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