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18-bu-2010 Mikrosystemtechnik · TUPlan

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18-bu-2010

Mikrosystemtechnik

FB18 Electrical Engineering and Information Technology · Offered in WiSe 2025/26

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Weekly sessions · WiSe 2025/26

Thu13:30–14:15S306/053 · Übung
Fri09:50–11:30S306/053 · Vorlesung

Parts

18-bu-2010-vlLecture2 contact h/week
18-bu-2010-ueExercise1 contact h/week

Language: Deutsch
Taught by: Prof. Ph.D. Thomas Peter Burg

Course content

Einführung und Grundbegriffe der Mikrosystemtechnik; Skalengesetze; Werkstoffe und Herstellungsprozesse der Mikrosystemtechnik und Nanotechnologie. Mikromechanik. Design von Mikrosystemen: Sensoren, Aktoren, mikrofluidische Systeme. Die Themen werden mit zahlreichen Beispielen aus praktischen Anwendungen illustriert.

Exam dates

2026-02-27 · 14:00–16:00 · S306/051, S103/226 · Prüfung

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